1. Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
Author: / by Christopher L. Borst, William N. Gill, Ronald J. Gutmann
Library: Campus International Library of Kish University of Tehran (Hormozgan)
Subject: Interconnects (Integrated circuit technology),Semiconductors -- Polishing,Grinding and polishing,Chemical mechanical planarization
Classification :
TK
7874
.
53
.
B67
2002
